Seminet Automation
Careers Information request Sitemap
Environmental Control

Atmospheric Mini-Environment

E-Beam Enclosure

Environmental Monitoring

Air Handling System
N2 Purged Mini-Environment with EFEM

N2 Purged Environments

Equipment Automation
Factory Automation
Reticle Handling
Featured Product
Infinity- SACS™ (Semi Automated Carousel Stocker) Infinity- SACS™ (Semi Automated Carousel Stocker)
• High Density Storage
• Multi Access Points
• Scalable Storage Shelves
• Ultra Clean Environment
• Serviceability
• Stocker Management System
read more
In the News
read more
http://www.seminet.com | Our Products | Environmental Control | Air Handling System

Air Handling System

Air Handling System

Seminet Automation provides a complete line of precision temperature and humidity control air handling systems. The EVAC Air handling system (Environmental Air Control) is engineered to supply your process tool with single or multiple outputs for your process requirements. The EVAC can be integrated with AMC chemical filtration to provide a source for clean air in a compact footprint for your process needs.

Features
• Temperature control: ±0.01°C.
• Humidity Control: ±0.1% RH (Relative Humidity).
• Single or multiple outputs.
• 100-12,000 CMF output solutions.
• Integrated AMC Chemical Filtration.
• Capable of being remote to save valuable Fab floor space.
• Most Cost Effective Air Handling Solution in the market.
Home Company Products Services News Contact
[ Careers | Information request | Sitemap ] Designed by Web Rhino