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Environmental Control

Atmospheric Mini-Environment

E-Beam Enclosure

Environmental Monitoring

Air Handling System
N2 Purged Mini-Environment with EFEM

N2 Purged Environments

Equipment Automation
Factory Automation
Reticle Handling
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Infinity- SACS™ (Semi Automated Carousel Stocker) Infinity- SACS™ (Semi Automated Carousel Stocker)
• High Density Storage
• Multi Access Points
• Scalable Storage Shelves
• Ultra Clean Environment
• Serviceability
• Stocker Management System
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http://www.seminet.com | Our Products | Environmental Control | Atmospheric Mini-Environment

Atmospheric Mini-Environment.

Atmospheric Mini-Environment

Seminet Automation is the leader in the design and development of precision atmospheric Minienvironment for the semiconductor industry. Seminet works with our OEM's and End-users to customize the Minienvironment to meet your process tool requirements and dimensions. The Minienvironment features integrated Fan Filter Units (FFU) with adjustable speed controls to accurately adjust the Minienvironment pressure and laminar flow. Custom designed to meet your requirements and available with precision temperature and humidity control systems, our Mini-Environments provide the most reliable and cost effective solution for your process needs.

Features
• ISO Class 3 or better Filtration
• Integrated Fan Filter Units with adjustable speed control .
• Integrated AMC Chemical Filtration.
• Integrated Temperature/Humidity Control.
• Stainless steel frame and panels.
• Integrated ionization system.
• SEMI E-78 compliance.

Applications
• Photolithography tools.
• Wet process cleaning.
• Metrology tools.
• CMP tools.
• PhotoMask tools.
• Laser MEMS.

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