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http://www.seminet.com | Our Products | Environmental Control | E-Beam Enclosure

E-Beam Enclosure.

E-Beam enclosure

E-Beam (Electron beam) lithography is today's standard technology for application in the world of nanotechnology. E-beam direct writing provides the capability to significantly reduce cycle time during system development by quickly providing the hundreds of different chips needed for a single mainframe. For this process to be successful, the highest level of temperature, humidity, EMI and vibration control has to be achieved.

 

Seminet Automation is the leader in the design and development of custom E-beam enclosures for the semiconductor industry. Seminet Automation provides a complete solution for your E-beam requirements which includes the following:

Precision Air Handling:
The EVAC Air handling system (Environmental Air Control) is engineered to supply the E-beam enclosure with remote precision controlled temperature/humidity air supply. The EVAC can be integrated with AMC chemical filtration to filter any harmful chemicals from the ambient environment.
Air Handling Features:
•  Temperature control: ±0.01°C.
•  Humidity Control: ±0.1% RH (Relative Humidity).
•  Single or multiple outputs.
•  100-12,000 CMF output solutions.

EMI Reduction:
High-resolution electron microscopes (SEM/TEM) and focused ion beam systems (FIB) are especially sensitive to environmental stray fields. Our enclosure is designed to reduce the magnetic field around the E-beam column to less the 0.1MG.

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