Features:
Differential Pressure Sensor:
0 - 0.25 inch of H2O positive static pressure will be monitored inside the Mini-Environmental Enclosure relative to the surrounding areas.
Particle Count:
The Particle Count system provides monitoring of 0.3 micron at 0.1 cfm (2.83lpm) (0.1 micron particle monitoring optional). The particle count system will be mounted at the center of the mini-environment to provide the best exposure to sample contamination. The particle count is enclosed in a small stainless steel enclosure witch will be mounted externally from the process chamber.
Air Velocity Sensor:
The air velocity sensor is designed to measure low velocity airflow approximately 0-100FPM with an accuracy of 2.5%. The remote sensing head allows for measurement of airflow in small and confined locations. Three air velocity sensors will be mounted directly below the filter face, which will provide real time monitoring.
ESD Event Sensor:
The ESD Event sensor provides continuous real time monitoring of ESD Events within the minienvironment, which will improve response time to harmful ESD problems.
Temperature/Humidity Sensor:
The temperature/Humidity sensor can be customized to meet the range and requirements of your process tool.
Power Requirements:
24VDC
Communications:
100base T Ethernet port and dual RS485 ports