Seminet Automation
Careers Information request Sitemap
Environmental Control

Atmospheric Mini-Environment

E-Beam Enclosure

Environmental Monitoring

Air Handling System
N2 Purged Mini-Environment with EFEM

N2 Purged Environments

Equipment Automation
Factory Automation
Reticle Handling
Featured Product
Infinity- SACS™ (Semi Automated Carousel Stocker) Infinity- SACS™ (Semi Automated Carousel Stocker)
• High Density Storage
• Multi Access Points
• Scalable Storage Shelves
• Ultra Clean Environment
• Serviceability
• Stocker Management System
read more
In the News
read more
http://www.seminet.com | Our Products | Environmental Control | N2 Purged Environments

N2 Purged Environments

N2 Purged Environments

Seminet Automation is the leader in the design and development of precision N2 Purged Minienvironment for the semiconductor industry. Seminet works with our OEM's and End-users to customize the Minienvironment to meet specific process tool requirements and dimensions. The N2 Purged Minienvironment features an advanced N2 adaptive control solution to minimize the consumption of the N2 within the mini-environment and provide dew point control down to -55dp. Our Mini-environment's are also integrated with Fan Filter Units (FFU) with adjustable speed controls to accurately adjust the Minienvironment pressure and laminar flow and provide ISO class-3 environment. Custom designed to meet your requirements and available with precision temperature our N2 Mini-Environments provide the most reliable and cost effective solution for your process needs.

Features
• Advanced recirculating N2 adaptive control solution to minimize the consumption of the N2 within the mini-environment .
• ISO Class 3 or better Filtration.
• Integrated Fan Filter Units with adjustable speed control.
• Integrated Temperature Control .
• Stainless steel frame and panels.
• Dew point control down to -55 .
Home Company Products Services News Contact
[ Careers | Information request | Sitemap ] Designed by Web Rhino