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Seminet Automation is the leader in the design and development of precision N2 Purged Mini-Environments for the semiconductor industry. Seminet works with our OEM's and End-users to customize the Mini-Environment to meet specific process tool requirements and dimensions. The N2 Purged Mini-Environment features an advanced N2 adaptive control solution to minimize the consumption of the N2 within the mini-environment and provide dew point control down to -55dp. Our Mini-Environmens are also integrated with Fan Filter Units (FFU) with adjustable speed controls to accurately adjust the Mini-Environment pressure and laminar flow and provide an ISO class-3 environment.The N2 Purged Mini-Environment with
EFEM provides the addditional feature of a 200mm SMIF Load Port for fully automated reticle handling. Custom designed to meet your requirements and available with precision temperature control, our N2 Mini-Environments provide the most reliable and cost effective solution for your process needs. |