Seminet Automation
Careers Information request Sitemap
Environmental Control

Atmospheric Mini-Environment

E-Beam Enclosure

Environmental Monitoring

Air Handling System
N2 Purged Mini-Environment with EFEM

N2 Purged Environments

Equipment Automation
Factory Automation
Reticle Handling
Featured Product
Infinity- SACS™ (Semi Automated Carousel Stocker) Infinity- SACS™ (Semi Automated Carousel Stocker)
• High Density Storage
• Multi Access Points
• Scalable Storage Shelves
• Ultra Clean Environment
• Serviceability
• Stocker Management System
read more
In the News
read more
http://www.seminet.com | Our Products | Environmental Control | N2 Purged Mini-Environment with EFEM

N2 Purged Mini-Environment with EFEM

N2 Purged Mini-Environment with EFEM

Seminet Automation is the leader in the design and development of precision N2 Purged Mini-Environments for the semiconductor industry. Seminet works with our OEM's and End-users to customize the Mini-Environment to meet specific process tool requirements and dimensions. The N2 Purged Mini-Environment features an advanced N2 adaptive control solution to minimize the consumption of the N2 within the mini-environment and provide dew point control down to -55dp. Our Mini-Environmens are also integrated with Fan Filter Units (FFU) with adjustable speed controls to accurately adjust the Mini-Environment pressure and laminar flow and provide an ISO class-3 environment.The N2 Purged Mini-Environment with EFEM provides the addditional feature of a 200mm SMIF Load Port for fully automated reticle handling. Custom designed to meet your requirements and available with precision temperature control, our N2 Mini-Environments provide the most reliable and cost effective solution for your process needs.

Features
• Advanced recirculating N2 adaptive control solution to minimize the consumption of the N2 within the mini-environment
• ISO Class 3 or better Filtration
• Integrated Fan Filter Units with adjustable speed control
• Integrated Temperature Control
• Stainless steel frame and panels
• Dew point control down to -55dp
• Fully automated reticle handling
• 200mm SMIF Load Port
Home Company Products Services News Contact
[ Careers | Information request | Sitemap ] Designed by Web Rhino