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The ExpressLoad-200™ is an advanced load port for 200mm wafer SMIF carriers. Designed to meet SEMI standards, the ExpressLoad-200™ features the cleanest and most reliable SMIF interface solution for your process requirements. Integrated with state-of-the art wafer mapping the ExpressLoad-200 is capable of detecting crossed slotted, double, or missing wafers in the SMIF cassette prior to processing. With a Single line Ether net communication and advanced UI the ExpressLoad-200 is easily integrated into your process tool. |