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200mm SMIF

200mm SMIF open cassette

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http://www.seminet.com | Our Products | Equipment Automation | 200mm SMIF

200mm SMIF.

200mm SMIF

The ExpressLoad-200™ is an advanced load port for 200mm wafer SMIF carriers. Designed to meet SEMI standards, the ExpressLoad-200™ features the cleanest and most reliable SMIF interface solution for your process requirements. Integrated with state-of-the art wafer mapping the ExpressLoad-200 is capable of detecting crossed slotted, double, or missing wafers in the SMIF cassette prior to processing. With a Single line Ether net communication and advanced UI the ExpressLoad-200 is easily integrated into your process tool.

Features
• SEMI Standard Bolts Interface
• Kinematics couplings for accurate alignments
• Minimized particle generation (All moving parts are below wafer processing level).
• N2 Purge Port for purging the SMIF pod (option)
• S2 and S8 Compliant
• E64 Cart Docking Interface
• E15.1 Bolts Interface

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