The Matrix-EFEM (Environmental Front End-Module) is designed to be integrated into any semiconductor process tool for front-end or back-end applications. With advanced automation capable of handling 300mm, 200mm, 150mm, and reticles. The Matrix Ranges from 1-4 Load port configurations and its modular design can be customized to fit your system requirements. The Matrix-EFEM can be interfaced with Seminet Automation's complete line of wafer and reticle handling equipment, including single or dual arm robots, pre-aligners, FOUP or SMIF openers, FOSB openers and reticle cassettes. The matrix can be integrated with other suppler components and customized to fit the equipment requirements. The operation of the Matrix-EFEM can be controlled via an integrated system controller with a single line Ethernet communication to the equipment controller. The Matrix can also be controller by the customer supplied software.