The Wafer Scanning System provides automated inspection of 200 mm and 300 mm wafers. Employing proprietary non-destructive inspection technology, the Wafer Scanning System detects, classifies, and stores information on defects and particulates on polished bare and processed silicon wafers. The customizable Wafer Scanning System offers chipmakers low-cost, high-performance, detection of defects and particulates, therby improving yields. The most cost-effective solution on the market, the Wafer Scanning System also lowers fab capitalization costs, lowers fab operational cost-of ownership, amd improves fab profitability.