The Safeguard-BLIS Bright Light Inspection System is the next generation in particle inspection and nitrogen cleaning system for reticles up to 230 mm(9") squares. Utilizing a Bright Light Inspection which includes optics and high intensity light source, the Safeguard-BLIS allows the operator to visually see any defects or particles deposited on the surface of the reticle ensuring a clean process. The Safeguard-BLIS unique design meets the high demand of today's lithography and mask house requirements by providing:
• ISO Class 3 or better storage environment
• Advanced reticle handling robotics with edge grip end-effector
• Bright Light Inspection System which includes optics and high intensity light source.
• N2 Particle Removal System with in line 0.03µm particle filtration and ionization.
• Smallest footprint in the market
• SEMI compliant load ports
• Supports multiple reticle pods such as 200mm SMIF, 150mm SMIF, Canon, Nikon, and ASML.
• Optional Pre-aligner with integrated reticle/pellicle ID
• Optional 10µm or greater automatic particle inspection system
• Optional Pellicle Removal System
• Optional Pellicle Mounting System
• Optional Temperature Control: ±0.01°C
• Optional Humidity Control: ±0.1% RH (Relative Humidity)
• Optional Integrated AMC Chemical Filtration