The Safeguard-BRS Bare Reticle Stocker is the next generation in high density storage of reticles up to 230 mm (9") square. The Safeguards unique design meets the high demand of today's lithography and mask house requirements by proving:
• ISO Class 3 or better storage environment
• Advanced reticle handling robotics
• Completely isolated storage environment.
• Vertical storage carousel provides smaller footprint with high density storage.
• Up to 3000 reticles Storage capacity within the same footprint
• Up to 4 load ports for higher availability and throughput
• Supports multiple reticle pods such as 200mm SMIF, 150mm SMIF, Canon, Nikon, and ASML.
• OHT compliant interface
• Optional Temperature control: ±0.01°C
• Optional Humidity Control: ±0.1% RH (Relative Humidity)
• Optional Integrated AMC Chemical Filtration
• SEMI E-78 compliance
Complete Reticle Protection
The Seminet introduces an innovative concept for the storage of reticles within an automated reticle stocker: the vertical carousel. The vertical carousel completely isolates reticles from the surrounding environment using a patent pending vertical carousel system with integrated Fan Filter Units which supplies continuous ISO Class 3 ultra-clean air flow to all the reticles within the storage system. All moving parts are isolated outside the vertical carousel eliminating any service-related entry into the reticle storage area. Reticles are protected from ESD induced damage using ionizers directly under the Fan Filter Units reticle are stored on static dissipative materials eliminating another major concern associated with bare reticle storage. Testing has proven that the safeguard-BRS provides the highest degree of reticle protection and cleanest environment in the industry.