The Safeguard-RHICS Reticle Handling, Inspection, and Cleaning System is the next generation in automated reticle handling, inspection, and cleaning of reticles up to 230 mm (9") square. The Safeguard-RHICS provides improved stepper utilization and reduced lithography rework as a result of defect-free reticles presented to the stepper in the proper orientation. The Safeguard-RHICS ensures a clean reticle, first, by providing an ISO Class 3 or better operating environment with ULPA filter coverage. Secondly, contamination is controlled by featuring either a Bright Light Inspection, which includes optics and high intensity light source to allow the operator to visually see any defects or particles deposited on the surface of the reticle, or an optional fully automated Particle Detection System, which can detect particles 1µm or greater. Finally, coupled with the N2 Particle removal system with in-line 0.03µm particle filtration and ionization, the Safeguard-RHICS enables a clean reticle to be transferred to the photolithography system. The Safeguard-RHICS ranges from 1-4 BOLTS Interface compliant Load Port configurations and its modular design can be customized to fit your system requirements. The Safeguard-RHICS’s unique design meets the high demand of today's lithography and mask house requirements. This tool includes Optional Pellicle Removal System and automated pellicle mounter.