The Safeguard-RIS Reticle Inspection System is a high throughput automated reticle inspection system for 150mm reticles capable of detecting 0.1µm particles. The fully automated system prevents mask
and pellicle damage from mishandling normally encountered in manual inspection processes.

The Safeguard-RIS allows masks to be routinely re-qualified by performing an inspection prior to its use thus improving stepper utilization and reducing lithography rework.

The Safeguard-RIS features include:

• ISO Class 2 or better min-environment with 100% ULPA filter coverage
• Advanced reticle handling robotics with edge grip end-effector
• Available Inspection levels of 0.1µm, 1µm or 10µm particle sizes
• N2 Blow-Off for particle removal with in line 0.03µm particle filtration
• Smallest footprint in the market
• SEMI load ports for 200mm SMIF, 150mm SMIF, Canon, Nikon, ASML
• RFID Read/Write for SMIF loadports
• SEMI standard GUI with touchscreen, keyboard, and 3D mouse
• Preprogrammed recipes for all functions and user created recipes
• SEMI standard GUI with touchscreen, keyboard, and 3D mouse
• Reports the number of detected particles on each surface
• Size and location of particles are displayed in a defect map
• Defect table and defect size histogram are also displayed
• Defect data is stored in an on-board database
• SEMI S2, S8, F47 and CE compliant (certification upon request)
• SECS/GEM compliant for Host communications

Optional features :
• Reticle Pre-aligner with integrated reticle/pellicle ID
• Environmental control: Temp ±0.05°C, Humidity: ±0.5% RH, AMC Chemical Filtration
• N2 Purged Environment for Low O2 or Low Humidity requirements (<100ppm)
• Automated Pellicle Mounting or Removal
• BLIS (Bright Light Inspection System) for manual inspection