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Environmental Control

Safeguard-RIS Reticle inspection

Safeguard-BLIS Bright Light

Safeguard-RS

Safeguard-RHICS

Pellicle Removal System

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Infinity- SACS™ (Semi Automated Carousel Stocker)

• High Density Storage
• Multi Access Points
• Scalable Storage Shelves
• Ultra Clean Environment
• Serviceability
• Stocker Management System

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http://www.seminet.com | Our Products | Reticle Handling | Safeguard-RSS

• Safeguard-RSS Reticle Sorter System

Safeguard-RS

The Safeguard-RSS Reticle Sorter System is the next generation in advanced reticle handling automation of reticles to 230 mm (9") square. The Safeguard-RS is a high throughput ultra clean sorter system with an intuitive software interface making the sorting of reticle quick and easy.The Safeguard-RS Ranges from 1-4 Load port configurations and its modular design can be customized to fit your system requirements. The Safeguard-RS can be configured to sort between the following cassettes:

Features
• ISO Class 3 or better storage environment
• Intuitive software interface for fast and reliable sorting
• Recipe driven sorting routines
• Advanced reticle handling robotics with edge grip end-effector
• Smallest footprint in the market
• SEMI compliant load ports
• Supports multiple reticle pods such as 200mm SMIF, 150mm SMIF, Canon, Nikon, and ASML.
• S2 and S8 Compliant

Options
• 10µm or greater automated particle detection system
• 1µm or greater automated particle detection system
• Bright Light Inspection System which includes optics and high intensity light source.
• N2 Particle Removal System with in line 0.03µm particle filtration and ionization.
• Optional Pre-aligner with integrated reticle/pellicle ID
• Optional Temperature Control: ±0.01°C
• Optional Humidity Control: ±0.1% RH (Relative Humidity)
• Optional Integrated AMC Chemical Filtration

Supported Cassette Types
• 150mm Reticle SMIF POD
• 200mm Reticle SMIF Pod
• HOYA Reticle Shipping Box
• Clamshell Shipping Box
• Canon Stepper Box
• Nikon Stepper Box
• ASML Stepper Box
• Toppan Shipping Box

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