The Safeguard-RTS Reticle Transfer System is the next generation in automated transfer of reticles up to 230 mm (9”) square. Designed to be a seamless interface to photolithography, metrology, or cleaning process of equipment, the Safeguard-RTS is a high throughput ultra clean transfer system. Its compact footprint enables the Safeguard-RTS to be integrated with new equipment or field retrofit table to already installed equipment in semiconductor fabs and mask houses