• Frontend Mini Environment

SemiNet provides a complete advanced tool qualification and certification program.The purpose of this program is to measure the performance of the integrated mini environment and front-end automation for any process and provide a complete inspection report that will include:

Reliable & Trouble-Free Qualification of Semiconductor Equipment
• Rapid production and process qualifications
• Proactive approach to production start-up issues

Visual Inspection
The visual inspection will be conducted to evaluate system quality and to insure that the system confirm to the latest ISO and semi Standard

Air Velocity Test
The velocity of air movement within the enclosure will be measured and caliborated to the specification parameters.

Static Pressure Test
The static pressure measured inside the tool and front-end enclosure will be measured to insure differential positive pressure to ambient and to confirm to the specified description parameters.

Installed Filter Leak Test
Airborne particle measurement and leak tests for all filters within the front end and process tool mini environment will be conducted to ensure that all filters are properly sealed, no pinholes exist and all filters are within the specification efficiency and specifications.
The integration and qualification of semiconductor equipment is a complicated and time-consuming activity. New products and processes have to be qualified before to be utilized in the shortest time allowable. SemiNet has developed a program designed to test and qualify semiconductor 300mm or 200mm front end and Mini environment equipment at the IC fabrication facility prior to start up as well as testing and re-qualifying existing equipment. Our service and support team members, with the most advanced test equipment, can support you through the post-installation phases, ensuring successful:

• Minienvironment and Front-end qualification
• ESD, E-78 qualification
• Process validation and reliability

SemiNet's goal is to optimize customers' startup schedules and fab output requirements by providing faster process qualification and seamless integration of tools into the production environment.
With State-of-The art testing equipment and 18 years in semiconductor equipment SemiNet provide a very professional service of qualification and recommendation to bring the tech-support to the highest standard to confirm with the latest requirement for Semi and ISO Standards. The program will include:

Visual Inspection
A visual test will be conducted to ensure that there are no physical defects associated with the equipment. Defects include, scratches, denting, warping, broken seals, hazing, chipped paint and more. After a thorough inspection, SemiNet will provide a proper course of action to correct any defects located.

Installed filter leak test
Airborne Particles Count – Static Test
This test will be conducted inside the front end and tool mini environment to insure that the design confirms to ISO # 14644-2 standard and provide particle size measured. Average particle concentration per location, mean of the average standard deviation of the average, standard error.

Airborne Particles Count-Dynamic Test
This test will provide airborne particle measurement qualification with all components in operation including load port, robot load decks, process chambers, etc.

Airborne Particle Count- Recovering Test
This test will be conducted to confirm that the mini environment will recover back to the specification cleanliness level after opening a door or window and closing within one minute.

Surface Particle Test
A minute of IS fifteen surface count measurement will be supplied at different surfaces to insure all surface counts are with the specified limits.

ESD Test
Test will be done according to semi E-43-0301 to insure that all surface charges will not influence wafer products.