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Data Technology

Semiconductor Solutions

Reticle Handlers

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The Seminet Reticle Handler is the fourth generation in automated reticle handling, inspection, and cleaning of 6" inch square reticles. 

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  • Unique Automatic Inspect-and-Clean capability 

  • Industry leading 1 micron inspection capability

  • Automated reticle transfers between shipping boxes and stepper pods

  • Automatic reticle orientation for stepper compatibility

Reticle Stockers

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The Seminet Stocker is ultra-clean, fully automated reticle storage solution. We provide industry leading storage of up to 13,500 bare reticles and the highest storage density of up to 45 reticles per square feet. Our third-generation modular design is configurable for 1,500, 3,900, 8,700 or 13,500 reticles.

Pellicle Demounter

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The Seminet Pellicle Demounter is the next generation in automated pellicle removal from 6 inch reticles leaving NO glue residue behind.

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  • Fully-automated Demounter eliminates contamination and potential damage from manual handling

  • Configurable recipes allow tight process control for your specific needs

  • Reduces the need for using harsh cleaning methods which increases the life of the reticle while reducing hazardous waste

Pod Buffer

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The Seminet Pod Buffer provides a space efficient solution for Pod storage in an automated cleanroom environment with the following features:

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  • Stores 16-48 FOUP/SMIFs or Reticle SMIFs

  • Stand alone or Integrated with any OEM tool

  • Supports AGV, PGV and OHT Delivery

  • GEM Messaging to Host or integrated with OEM tool

Carousel Pod Stocker

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The Seminet Carousel Pod Stocker proivdes a spaced-efficient solution for Pod storage in an automated cleanroom environment.

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  • Stores any pod, or shipping box

  • Available in various heights to use chase depth to store carriers as opposed to bay width

  • Capacity can be 100”s to 1000”s depending on height available and pod size.

  • Cleanroom environment inside stocker by using HEPA filters to provide laminar flow top to bottom and exhaust fans for areas with moving parts.

  • Supports AGV, PGV and OHT Delivery

  • Inventory tracking software with GEM comm to host for realtime updates and status.

Tool Enclosures

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Custom tool enclosures with integrated precision environmental control including temperature, humidity and air flow.

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