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​The Seminet Pod Buffer delivers a space-efficient solution for Pod storage in an automated cleanroom environment with the following features:

  • Stores 16-48 FOUP/SMIFs or Reticle SMIFs

  • Stand alone or Integrated with any OEM tool

  • Supports AGV, PGV and OHT Delivery

  • GEM Messaging to Host or integrated with OEM tool

Product Details
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